|Office||Powell Hall 528|
|Office hours||T 1:00-3:00
IScience & Engineering of Microelectronic Fabrication, by Campbell, Addison Wesley Publishing, 1997.
1) Introduction to Microelectronics Fabrication (Vol. V Modular Series on Solid State Devices), Richard C. Jeager, Addison - Wesley Publishing Company, 1993.
2) Silicon Processing for the VLSI era, Vol. 1 - 3, Wolf & Tauber, 1990
|January 9||Introductory remarks & grouping of students|
|January 16||Si wafers, preparation, orientation, & defect characterization|
|January 23||Thermal oxidation of Si|
|February 07||Overall process description, mask layout & comments on writing technical reports|
|February 13||Quiz # 1 (Oxidation & Lithography)|
|February 27||Ion Implantation|
|March 6||Etching (Wet & Plasma)|
|March 13||Quiz # 2 (Diffusion & Ion Implantation|
|March 20||Spring Break|
|April 3||Electrical characterizations of PN, Schottky diodes, resistors, TLMs, etc.|
|April 10||Electrical Characterization of MOSFETs|
|April 17||Quiz # 3 on DC characterization|
|April 24||Assembly & Packaging & Concluding remarks (Final Report Due)|
|Final Report (Due: April 24)||50%|
For every day delay in turning your final report, you will lose 10% of its credit.
Important Notes: If there is any sign of copying previous EE 438 lab reports, the guilty student will receive 0% for that report and will be referred to the Office of Student Conduct for further action.
Any violations of the University Student Conduct Code will be referred to the Office of Student Conduct.