| Instructor | Kian Kaviani |
| Office | Powell Hall 528 |
| Phone | 213.740.8495 |
| Office hours | T 1:00-3:00
PM or by appointment |
| kaviani@usc.edu |
Textbook:
IScience
& Engineering of Microelectronic Fabrication, by Campbell, Addison Wesley Publishing, 1997.
References:
1) Introduction to Microelectronics Fabrication (Vol. V Modular
Series on Solid State Devices), Richard C. Jeager, Addison - Wesley
Publishing Company, 1993.
2) Silicon Processing for the VLSI era, Vol. 1 - 3, Wolf &
Tauber, 1990
| January 9 | Introductory remarks & grouping of students |
| January 16 | Si wafers, preparation, orientation, & defect characterization |
| January 23 | Thermal oxidation of Si |
| January 30 | Lithography |
| February 07 | Overall process description, mask layout & comments on writing technical reports |
| February 13 | Quiz # 1 (Oxidation & Lithography) |
| February 20 | Diffusion |
| February 27 | Ion Implantation |
| March 6 | Etching (Wet & Plasma) |
| March 13 | Quiz # 2 (Diffusion & Ion Implantation |
| March 20 | Spring Break |
| March 27 | Metallization |
| April 3 | Electrical characterizations of PN, Schottky diodes, resistors, TLMs, etc. |
| April 10 | Electrical Characterization of MOSFETs |
| April 17 | Quiz # 3 on DC characterization |
| April 24 | Assembly & Packaging & Concluding remarks (Final Report Due) |
| Quizzes | 20% |
| Lab Performance | 20% |
| Final Report (Due: April 24) | 50% |
Important Notes:
For every day delay in turning
your final report, you will lose 10% of its credit.
Important Notes: If
there is any sign of copying previous EE 438 lab reports, the
guilty student will receive 0% for that report and will
be referred to the Office of Student Conduct for further action.
Any violations of the University
Student Conduct Code will be referred to the Office of Student
Conduct.